Tribology In Chemical-Mechanical Planarization
Huge Savings Item! Save 11% on the Tribology In Chemical-Mechanical Planarization by Brand: CRC Press at Birzula. Hurry! Limited time offer. Offer valid only while supplies last. The role that friction and contact play in the processes of wear and planarization on material surfaces is central to the understanding of
As the first source to integrate CMP and tribology, the book illustrates the important role that these fields play in manufacturing and technological development. It follows with an examination of tribological principles and their applications in CMP, including integrated circuits, basic concepts in surfaces of contacts, and common defects. Other topics covered in depth include basics of friction, flash temperature, lubrication fundamentals, basics of wear, polishing particles, and pad wear. The book concludes its focus with CMP practices, discussing mechanical aspects, pad materials, elastic modulus, and cell buckling.
Expanding upon the science and technology of tribology to improve the reliability, maintenance, and wear of technical equipment and other material applications, Tribology in Chemical-Mechanical Planarization provides scientists and engineers with clear foresight to the future of this technology.
|Brand:||Brand: CRC Press|
|Item Weight:||1.03 pounds|
|Item Size:||0.5 x 9.25 x 9.25 inches|
|Package Weight:||1 pounds|
|Package Size:||6.4 x 0.7 x 0.7 inches|